| Low Homologous Temperature (0.2) Sputtering of Indium Films on Silicon (POSTPRINT) |
24 Sep 2012 |
6 pages |
| Authors:
Tuoc Dang; Darryl Shima; Ganesh Balakrishnan; Antao Chen; Robert G Bedford; AIR FORCE RESEARCH LAB WRIGHT-PATTERSON AFB OH SENSORS DIR
|
 | Substrate temperature is used to control the film morphology and packing of indium metal deposited by DC sputtering. Indium is sputtered on silicon at room- and liquid nitrogen cryogenic-temperatures resulting in very different homologous temperatures of 0.7 and 0.17. The deposition of the indium film at 0.2 homologous temperature results in increased film packing density, reduced voids, and a near specular indium surface which is very different from the extremely ... |
|
| Center of Excellence for Battlefield Capability Enhancements: Envronmentally Stable Flexible Displays |
18 Jan 2012 |
121 pages |
| Authors:
Shanthi Iyer; Jay Lewis; NORTH CAROLINA AGRICULTURAL AND TECHNICAL STATE UNIV GREENSBORO OFFICE OF SPONSORED PROGRAMS
|
| The focus of the Center is to develop and demonstrate novel materials, both for device structures that advance the state-of-the-art in flexible electronics, as well as for environmentally-stable, hybrid, organic/inorganic semiconductors, leading to robust luminescent devices for flexible displays for the U.S. soldier. Performance of transparent and conducting oxides of indium tin oxide and F-doped ZnO films on plastics and their stability under mechanical deformation were investigated. Thin film transistors ... |
|
| Silicon-nanocrystal Optoelectronic Kerr Effect for Complementary Metal-oxide Semiconductor (CMOS) Compatible Optical Switching |
APR 2011 |
18 pages |
| Authors:
Neal K. Bambba; Justin R. Bickford; Stefan F. Preble; ARMY RESEARCH LAB ABERDEEN PROVING GROUND MD
|
| There is a broad Army need to quickly transfer large amounts of data from sensors to processors on a wide variety of systems. Complementary metal-oxide semiconductor (CMOS) compatible optical intra-chip data communication systems would enable this data flow by increasing data rates and reducing circuit size and power. We investigated the fabrication of a monolithic CMOS-compatible optoelectronic silicon (Si) modulator for intra-chip communication. The modulator is designed to take advantage ... |
|
| A Novel Variable Wide Bandgap Material for High Power, High Frequency Devices |
13 Jan 2011 |
53 pages |
| Authors:
Rodney J Soukup; NEBRASKA UNIV LINCOLN DEPT OF ELECTRICAL ENGINEERING
|
| Every deposition technique has its advantages and disadvantages. Hollow cathode sputtering is no different, but, while one must acknowledge the downsides to this technique, it offers several advantages, providing the motivation behind selecting this method for depositing epitaxial thin films of SiC in this study. The system used here had previously been used to deposit crystalline Ge films with up to 9% C in lattice sites. Like the GeC films, ... |
|
| Advanced Photonic Sensors Enabled by Semiconductor Bonding |
31 MAY 2010 |
8 pages |
| Authors:
Jungsang Kim; DUKE UNIV DURHAM NC
|
| In this three-year research program, we designed and constructed a unique system capable of fusion bonding two wafers in an ultra-high vacuum environment. This system was integrated with a multi-chamber system that contains with XPS and UPS surface analysis tools and RF/DC sputtering system, to enable an experimental platform for insitu surface treatment, analysis, and bonding. We have developed various methods for preparing oxide-free silicon surfaces in UHV environment, and ... |
|
| Power MEMS Development |
Nov-2009 |
16 pages |
| Authors:
John Bumgarner; SRI INTERNATIONAL MENLO PARK CA PHYSICAL SCIENCES DIV
|
| SHORT LOOP EXPERIMENTS: During this period we completed one short loop experiment to verify the use of chromium (Cr) as a hard mask for silicon dioxide (SiO2) wet etching. This Cr hard mask was used during the fabrication of the Indent layer in the process flow. For this experiment, we deposited 3-micrometers of SiO2 on the wafer and then sputtered a layer of Cr. We patterned and etched the Cr, ... |
|
| Quartz Crystal Microbalance Based System for High-Sensitivity Differential Sputter Yield Measurements (Preprint) |
20-Aug-2009 |
17 pages |
| Authors:
J L Topper; B Rubin; C C Farnell; A P Yalin; AIR FORCE RESEARCH LAB EDWARDS AFB CA PROPULSION DIRECTORATE
|
| We present a quartz crystal microbalance (QCM) based system for high sensitivity differential sputter yield measurements of different target materials due to ion bombardment. The differential sputter yields can be integrated to find total yields. Possible ion beam conditions include ion energies in the range of 30-350 eV and incidence angles of 0-70o from normal. A four-grid ion optics system is used to achieve a collimated ion beam at low ... |
|
| An Elegant Low-cost Materials Solution for Achieving Low Insertion Loss, Affordable Tunable Filters for Next Generation Mobile Communications Platforms |
Apr-2009 |
18 pages |
| Authors:
M W Cole; E Ngo; R J Tan; ARMY RESEARCH LAB ABERDEEN PROVING GROUND MD WEAPONS AND MATERIALS RESEARCH DIRECTORATE
|
| The effect ultraviolet (UV)-assisted annealing on the structural, dielectric, and insulating properties of barium strontium titanate (BST) thin films was investigated. The material properties of BST films, prepared by RF sputter deposition, annealed via conventional thermal annealing and UV-assisted thermal annealing process protocols were compared and evaluated. The x-ray diffraction results showed contracted lattice constants and enhanced crystallinity for the RF sputtered BST films annealed via the UV-assist treatment. Isothermal-temporal ... |
|
| Oxide Semiconductors with Non-Volatile Resistance Switching |
Feb-2009 |
23 pages |
| Authors:
M Skowronski; J A Bain; P A Salvador; CARNEGIE-MELLON UNIV PITTSBURGH PA
|
| Metal-oxide-metal hetero-structures have been deposited by Pulsed Laser Deposition and sputtering and their I-V and switching characteristics investigated as a function of active oxide layer, top metal electrode type and structure, and oxide thickness. Non-volatile switching has been observed for structures containing (Pr,Ca)Mn03, (La,Ca)Mn03, (La,Sr)Mn03, Sr(Zr,Cr)03 and SrTi03 as the active layer and Mg, Cr, Cu, Ag, and Pt as the top metal. The electrical transport was due to space ... |
|
| Total and Differential Sputter Yields of Boron Nitride Measured by Quartz Crystal Microbalance and Weight Loss (Preprint) |
20 SEP 2007 |
14 pages |
| Authors:
Binyamin Rubin; James L. Topper; Azer P. Yalin; AIR FORCE RESEARCH LAB EDWARDS AFB CA PROPULSION DIRECTORATE
|
| We present results of differential sputter yield measurements of HBC and HBR grades of boron nitride due to bombardment by xenon ions. Total sputter yield measurements are made using a weight loss approach. Differential sputter yield measurements (of condensable components) are made using a quartz crystal microbalance (QCM). The QCM measurement allows full angular resolution, i.e. differential sputtering yield measurements are measured as a function of both polar angle and ... |
|
| Modeling of Hall Thruster Lifetime and Erosion Mechanisms (Preprint) |
SEP 2007 |
27 pages |
| Authors:
Shannon Y. Cheng; Manuel Martinez-Sanchez; MASSACHUSETTS INST OF TECH CAMBRIDGE DEPT OF AERONAUTICS AND ASTRONAUTICS
|
| An axisymmetric hybrid-PIC model of the Hall thruster plasma discharge has been upgraded to simulate the erosion of the thruster acceleration channel, the degradation of which is the main life-limiting factor of the propulsion system. Evolution of the thruster geometry as a result of material removal due to sputtering is modeled by calculating wall erosion rates, stepping the grid boundary by a chosen time step and altering the computational mesh ... |
|
| Calculating Sputter Rate Angular Dependence Using Optical Profilometry (Preprint) |
26 JUL 2007 |
34 pages |
| Authors:
Alexander C. Barrie; Bryan S. Taylor; Jared M. Ekholm; Jr Hargus William A.; AIR FORCE RESEARCH LAB EDWARDS AFB CA PROPULSION DIRECTORATE
|
| This work attempts to determine angular dependence curves for sputter rates of a material based on a single experimental measurement. An aluminum cylinder was exposed to a BHT-200 plume, and the resulting erosion profile was measured. This profile was fed into an optimizer, which calculated the angular dependence curve to match the given erosion profile. The calculated profile matched well with the experimental profile; however, neither matched well with previously ... |
|
| Minimization of Thruster Plume Effects on Spacecraft Surfaces |
MAY 2007 |
37 pages |
| Authors:
Peter J. Rohl; Juan Velez; Justin W. Koo; Michael Gorrilla; ADVATECH PACIFIC INC REDLANDS CA
|
| For the past several years, Advatech Pacific has been maintaining and enhancing the COLISEUM plume simulation environment under the direction of AFRL/PRSS. COLISEUM is a software environment used to model the propagation of a plasma plume and its interactions with solid surfaces (including both sputtering and re-deposition). A recent addition to the capabilities of COLISEUM is its integration with ModelCenter, the optimization and integration framework developed by Phoenix Integration. With ... |
|
| Advanced Microwave Ferrite Research (AMFeR): Phase Two |
31 DEC 2006 |
48 pages |
| Authors:
Jeffrey L. Young; IDAHO UNIV MOSCOW
|
| Reported herein are the key findings and activities associated with the Office of Naval Research (ONR) Advance Microwave Ferrite Research (AMFeR) Phase Two project. This project was conceived to develop high anisotropy ferrite crystals for microwave, self-biased circulator devices. To accomplish the research objectives stated in the proposal to ONR, the AMFeR team organized itself into three task-oriented groups: material fabrication, micromagnetic modeling and microwave device design. Principle team members ... |
|
| Silver Diffusion and High-Temperature Lubrication Mechanisms of YSZ-Ag-Mo Based Nanocomposite Coatings (Preprint) |
MAY 2006 |
43 pages |
| Authors:
J. J. Hu; C. Muratore; A. A. Voevodin; AIR FORCE RESEARCH LAB WRIGHT-PATTERSON AFB OH MATERIALS AND MANUFACTURING DIRECTORATE
|
| Yttria-stabilized zirconia (YSZ) nanocomposite coatings consisting of silver and molybdenum were produced by a hybrid process of filtered vacuum arc, magnetron sputtering and pulsed laser depositions for tribological investigations at different high temperatures. The microstructure of the coatings was determined by X-ray diffraction and transmission electron microscopy. The friction coefficients were measured using a high-temperature ball-on-disk tribometer at 25 to 700C. The coatings with 24 at.% Ag and 10 at.% ... |
|
| Analysis of Photoconductive Properties in Ge2Sb2Te5 (GST) Chalcogenide Films for Applications in Novel Electronics |
MAR 2006 |
141 pages |
| Authors:
John R. Chezem; AIR FORCE INST OF TECH WRIGHT-PATTERSON AFB OH SCHOOL OF ENGINEERING AND MANAGEMENT
|
| This thesis investigated the thermal phase-change properties in Ge(sub 2)Sb(sub 2)Te(sub 5) (GST) chalcogenide-based films and determined the feasibility of coupling the GST with photosensitive DNA material for novel optical device applications. Modeling and testing of GST were researched with the approach that GST would react as a resistive mechanism through thermal manipulation. A test structure was fabricated with a 2-micronmeter MEMS fabrication process. GST material was deposited (by RF ... |
|
| Heteroepitaxial Growth and Doping of ZnO for Optoelectronic Applications |
19 AUG 2005 |
6 pages |
| Authors:
Maharaj S. Tomar; Hector J. Jimenez; Ram S. Katiyar; PUERTO RICO UNIV MAYAGUEZ
|
| This is the final report of AFOSR grant Number F49620-01-1-0454. No cost extension for one year (31 August/04 to Sept.1/05) was granted by AFOSR. Summary of the research accomplishments duration the total duration 31 August 2001 - Sept. 1/2005 is presented. C- axis oriented ZnO films and nano rods have been grown by rf sputtering and pulse laser deposition (PLD). Thin films of Znl-xMgxO, Znl-xAlxO, and magnetic ion substituted ZnMO ... |
|
| Characterization of Boron Atom Aggregation |
26 JUN 2005 |
38 pages |
| Authors:
John P. Maier; BASEL UNIV (SWITZERLAND)
|
| The broad objectives of this IRI project which ran during three years June 2002- May 2005 were the investigations of the spectroscopic properties of boron species their aggregation and reactions in matrices ranging from neon to those doped with hydrogen. The studies of the aggregation properties were hampered by the lack of spectroscopic knowledge on the electronic transitions of the polyatomic boron molecules and their ions. Thus it was clear ... |
|
| MEMS Colloid Thruster Array |
JUN 2005 |
33 pages |
| Authors:
James Nabity; TDA RESEARCH INC WHEAT RIDGE CO
|
| TDA designed a single MEMS colloid emitter that can be readily extended to a multi-emitter array. The annular electrodes proposed by TDA and UC-Boulder have high local electric field strength at the nozzle to reduce the voltage needed to activate the electrospray. They also designed a fluidic valve to passively meter flow to each emitter in the array. Detailed micro fabrication process recipes were developed and proven by actually building ... |
|
| Tribology of Co-sputtered Nanocomposite Au/MoS2 Solid Lubricant Films Over a Wide Contact Stress Range |
15 JAN 2005 |
17 pages |
| Authors:
J. R. Lince; AEROSPACE CORP EL SEGUNDO CA LAB OPERATIONS
|
| Slip-ring assemblies for spacecraft, and other sliding electrical contacts, require low friction and wear, as well as low electrical resistance and noise. Most current slip-ring technologies (both solid- and liquid- lubricated) are over forty years old, and their robustness is often less than satisfactory. Newer technologies have been developed, but have also shown limitations in spacecraft applications. We are investigating alternate material technologies to address these issues, concentrating on sputter-deposition ... |
|
| Charging of Mirror Surfaces in Space |
2005 |
12 pages |
| Authors:
Shu T. Lai; AIR FORCE RESEARCH LAB HANSCOM AFB MA SPACE VEHICLES DIRECTORATE
|
| Spacecraft often charge to negative potentials of several kilovolts in eclipse at geosynchronous altitudes. We suggest that optical mirrors at geosynchronous altitudes will charge in sunlight as if in eclipse. Modem mirrors can attain very high reflectance, the reflected light being nearly as intense as the incoming light. With high reflectance, the sunlight photon energy imparted to mirror surfaces is greatly reduced, resulting in little or no photoemission. As a ... |
|
| Micro-Fluidic Applications of Telephone Cord Delamination Blisters |
2005 |
6 pages |
| Authors:
Alex A. Volinsky; Patrick Waters; Gregory Wright; UNIVERSITY OF SOUTH FLORIDA TAMPA DEPT OF MECHANICAL ENGINEERING
|
| Argon pressure significantly affects the residual stress in sputter deposited thin films and coatings. In case of W thin films, high residual stresses on the order of 1-2 GPa are quite common. With the rest of sputtering parameters being equal, argon pressure determines the sign and the value of residual stress. When the amount of stored elastic energy in the film due to the residual stress exceeds the interfacial toughness, ... |
|
| Development of a Micro- and Nano-Fabrication Facility |
08 DEC 2004 |
6 pages |
| Authors:
Alexander Couzis; Lane Gilchrist; Charles Maldarelli; David Rumschitzki; Maribel Vazquez; CITY COLL OF THE CITY UNIV OF NEW YORK
|
| The purpose of this project was to develop the first multiuser micro and nanofabrication facility at The City College of New York (CCNY). Four pieces of equipment were acquired under this award: (i) Spin Coating System from Laurell Technologies; (ii) Ozone Stripper from Samco; (iii) Reactive Ion Etcher from Samco; and (iv) Evaporator/Sputtering system from Denton Vacuum. In addition, our school provided additional matching funds that enabled this research group ... |
|
| Ultra-Smooth As-Deposited Optical Films |
31 MAR 2004 |
30 pages |
| Authors:
Dr. Namwoong Paik; PLASMION CORP HOBOKEN NJ
|
| In the Phase I program, PLASMION demonstrated the capability of Negative Sputter Ion Deposition to deposit optical thin films with state-of-the- art properties, specifically ultrasmooth surfaces, high packing density, refractive index close to bulk values, and stability to environmental exposure. The objective of this Phase II program was to utilize these films to fabricate high-quality, economical optical devices for high energy laser applications. Prototype dielectric mirrors will be delivered which ... |
|
| The Main Tendencies in Elaboration of Materials with High Specific Strength |
18 MAR 2004 |
41 pages |
| Authors:
S. Firstov; FRANTCEVYCH INST FOR PROBLEMS OF MATERIALS SCIENCE KIEV (UKRAINE)
|
| Viewgraphs from presentation on the main tendencies in the elaboration of materials with high specific strength. |
|
| Increased Surface Fatigue Lives of Spur Gears by Application of a Coating |
AUG 2003 |
14 pages |
| Authors:
Timothy L. Krantz; Clark V. Cooper; Dennis P. Townsend; Bruce D. Hansen; NATIONAL AERONAUTICS AND SPACE ADMINISTRATION CLEVELAND OH LEWIS RESEARCH CENTER
|
| Hard coatings have potential for increasing gear surface fatigue lives. Experiments were conducted using gears both with and without a metal- containing, carbon-based coating. The gears were case-carburized AISI 9310 steel spur gears. Some gears were provided with the coating by magnetron sputtering. Lives were evaluated by accelerated life tests. For uncoated gears, all of fifteen tests resulted in fatigue failure before completing 275 million revolutions. For coated gears, eleven ... |
|
| Characteristics of Pulse Magnetron Discharge with Power Supply from a Capacitor Energy Storage |
20 JUL 2003 |
2 pages |
| Authors:
A. I. Kuzmichev; Yu. I. Melnyk; V. Yu. Kulikovsky; P. Bohac; L. Jastrabik; NATIONAL TECHNICAL UNIV OF UKRAINE KIEVPOLYTECHNIC INST
|
| The peculiarities of pulse sputtering magnetron discharge in conditions of low-voltage power supply from capacitor energy storage are considered. Discharge current-voltage characteristics is shown to depend on pulse duration. The pulse packet regime ensures stable arc-free maintenance of the discharge at long time operation. |
|
| Flexible Three-Dimensional Modeling of Electric Thrusters in Vacuum Chambers |
25 JUN 2003 |
10 pages |
| Authors:
M. R. Gibbons; D. E. Kirtley; D. B. VanGilder; J. M. Fife; ENGINEERING RESEARCH AND CONSULTING INC(ERC INC) EDWARDS AFB CA
|
| A national team of researchers is developing a software system, COLISEUM, which performs calculations of plasma propagation and interaction with arbitrary 3%D surfaces. The applications of COLISEUM are wide- ranging, hut include simulating engine test configurations inside vacuum chambers and predicting sputtering and re-deposition on spacecraft surfaces. COLISEUM allows users to easily define complicated 3-D geometries using off the shelf CAD software, then select from a set of plasma expansion ... |
|
| Tribology of Composite Au-MoS2 Films at Varying Contact Stresses |
01 JUN 2003 |
20 pages |
| Authors:
J. R. Lince; AEROSPACE CORP EL SEGUNDO CA LAB OPERATIONS
|
| Solid-lubricant coatings for sliding electrical contact applications like slip-ring assemblies have very different requirements from typical applications like ball bearings and cutting tools: they have significantly lower contact stresses and sliding speeds. We are optimizing the performance of sputter-deposited nanocomposite Au-MoS2 films for such low con tact stress applications. Higher contact stress pin-on-disk tests (S(sub m) = 730 MPa) showed that low Au-MoS2 films (i.e., 22 to 38 at% Au) ... |
|
| On the GHz Frequency Response in Nanocrystalline FeXN Ultra-Soft Magnetic Films |
03 APR 2003 |
6 pages |
| Authors:
N. G. Chechenin; C. B. Craus; A. R. Chezan; T. Vystavel; D. O. Boerma; GRONINGEN UNIV (NETHERLANDS) MATERIALSSCIENCE CENTRE
|
| The periodicity and angular spread of the in-plane magnetization for ultrasoft nanocrystalline FeZrN films were estimated from an analysis of the ripple structure, observed in Lorentz transmission electron microscopy (LTEM) images. The influence of the micromagnetic ripple on the ferromagnetic resonance (FMR) width is analyzed using an approach based on the Landau-Lifshitz equation. A strong dependence of the resonance width on the magnetic moment dispersion is predicted. To a large ... |
|
| Deposition of Polycrystalline ZnO Films by Two-Step Method and Characterization of Thermal Annealing Effects |
03 APR 2003 |
6 pages |
| Authors:
Jin-Bock Lee; Myung-Ho Lee; Hye-Jung Lee; Jin-Seok Park; HANYANG UNIV SEOUL (REPUBLIC OF KOREA)DEPT OF ELECTRICAL ENGINEERING
|
| Polycrystalline ZnO thin films were deposited on SiO2/Si(100) substrate using RF magnetron sputtering. The film deposition performed in this work was composed of following two procedures; the 1st deposition for 30 min without oxygen at 100 W and the 2nd deposition with oxygen in the range O2(Ar+O2) = 10 ^ 50 %. Deposited ZnO films revealed a strongly c-axis preferred-orientation (the corresponding texture coefficient ^100 %) as well as a ... |
|
| Materials Research Society Symposium Proceedings Volume 740 Held in Boston, Massachusetts on December 2-6, 2002. Nanomaterials for Structural Applications |
FEB 2003 |
462 pages |
| Authors:
Christopher C. Berndt; Traugott E. Fischer; Ilya Ovid'ko; Ganesh Skandan; Thomas Tsakalakos; MATERIALS RESEARCH SOCIETY WARRENDALE PA
|
| This volume contains selected papers presented at the symposium whose thematic sessions covered nanostructured bulk materials, films, coatings and nanocomposites. These new materials are now being introduced in structural applications, such as wear resistance, plastic forming, and other load bearing applications, Nanophase or nanocrystalline materials are also being used in electronics, refractory, biological and catalytic applications, Progress in a wide range of structural applications for nanomaterials crucially depends on the ... |
|
| Microstructures and Mechanical Properties of Nanostructured Copper-304 Stainless Steel Multilayers Synthesized by Magnetron Sputtering |
2003 |
7 pages |
| Authors:
X. Zhang; A. Misra; H. Wang; J. D. Embury; R. G. Hoagland; LOS ALAMOS NATIONAL LAB NM MATERIALS SCIENCE AND TECHNOLOGY DIV
|
| Nanostructured Cu/304 stainless steel (SS) multilayers were prepared by magnetron sputtering at room temperature. 304SS has a face-centered cubic (fcc) structure in bulk. However, in the Cu/304SS multi layers, the SS layers exhibited fcc structure for layer thickness of less than or equal to 5 nm. For 304SS layer thickness larger than 5nm, bcc 304SS grains were observed to grow on top of the initial approx. 5 nm of fcc ... |
|
| Interface Conduction between Conductive ReO3 Thin Films and NdBa2Cu3O6 Thin Film |
2003 |
7 pages |
| Authors:
Manabu Ohkubo; Kumiko Fukai; Kohji Matsuo; Nobuyuki Iwata; Hiroshi Yamamoto; NIHON UNIV CHIBA (JAPAN) DEPT OF ELECTRONICS AND COMPUTER SCIENCE
|
| The Re oxide films were deposited on quartz glasses by RF reactive sputtering from a Re metal target. The lowest resistivity was observed in the film in-situ annealed at 200 deg. C in Ar atmosphere and showed the order of 10(exp -4) Ohm cm of which the value was still about 10 times as large as that of a single crystal ReO3. The temperature dependence of the resistivity revealed a ... |
|
| An Approach to Nanoglasses through Anodic Oxidation of Sputtered Aluminum on Glass Surface |
2003 |
7 pages |
| Authors:
Satoru Inoue; Song-Zhu Chu; Kenji Wada; NATIONAL INST FOR MATERIALS SCIENCE IBARAKI TSUKUBA (JAPAN)
|
| The new processes for the preparation of nanoglasses have been developed through anodic oxidation. The aluminum thin film sputtered on the ITO thin film on the glass surface was decomposed into alumina by anodic oxidation technique. The alumina layer possessed nanometer size pore array standing on the glass surface. The sizes of the pore was widened by acid etching from 10 approx. 20 nm to a few hundred nm. The ... |
|
| Infrared and Electrical Properties of Amorphous Sputtered (LaxA1l-x)2O3 films |
2003 |
6 pages |
| Authors:
R. A. Devine; AIR FORCE RESEARCH LAB KIRTLAND AFB NM SPACE VEHICLES DIRECTORATE
|
| Amorphous (LaxAl(sub 1-x))(sub 2)O3 (0.61 less than or equal to x less than or equal 0.73) films have been deposited by sputtering in a partially reactive atmosphere. The average dielectric constant of the as-deposited films was 13.4 and 12.5 following annealing at 700 C for 60 min in N2; both values were much lower than the single crystal values ~24 and 28 for LaA1O3 and La2O3, respectively. Leakage current densities ... |
|
| Journal of Crystal Growth Volume 246, Nos. 1-2, pp.1-176, December 2002 |
01 DEC 2002 |
|
| Authors:
G. B. Stringfellow; M. Schieber; R. S. Feigelson; D. T. Hurle; R. Kern; ELSEVIER SCIENCE PUBLISHERS AMSTERDAM (NETHERLANDS)
|
 | Partial Contents: Classical semiconductors. Temperature control in InGaAs-based quantum well Structures grown by molecular beam epitaxy on GaAs (100) and GaAs (111)B substrates; Atomic depth distribution and growth modes of Sn on Si(1111 41-In and alpha-33-Au surfaces at room temperature; Enhanced impurity incorporation by alternate Te and S doping in GaAs prepared by intermittent injection of triethylgallium and arsine in ultra high vacuum; Defect-selective etching of GaN in a modified ... |
|
| An Algorithm for the Determination of Coating Properties from Laser- Generated and Detected Rayleigh Waves Using Wavelet Analysis: Application to Sputtered Tantalum |
JUL 2002 |
16 pages |
| Authors:
M. A. Doxbeck; M. a. Hussain; J. Rama; A. Abbate; J. Frankel; ARMY ARMAMENT RESEARCH DEVELOPMENT AND ENGINEERING CENTER WATERVLIET NY BENET LABS
|
| We used single-source and single-detector laser-ultrasonic measurements to generate and detect Rayleigh waves on tantalum sputtered steel substrates. Group velocity dispersion curves were calculated from the single- detected signals using wavelet techniques. Theoretical dispersion curves were calculated via the Achenbach and Keshava analysis. A simplex minimization technique between theory and experiment, using known values for the substrate, allowed us to evaluate the coating parameters. The coating thickness was measured accurately ... |
|
| Solid-State Emitter Development |
JUL 2002 |
137 pages |
| Authors:
Marc Cahay; Punit Boolchand; CINCINNATI UNIV OH DEPT OF ELECTRICAL AND COMPUTER ENGINEERING AND COMPUTER SCIENCE
|
| Theoretical and experimental studies were performed to investigate the feasibility of realizing a new, voltage-activated, nonthermionic cathode proposed by Mumford and Cahay (based on W. Friz s concept). It consists of a heavily n-doped indium phosphide (InP) substrate upon which a layer of thin-film cadmium sulfide (CdS) is grown followed by a layer of lanthanum sulfide (LaS) with a metal grid atop it. Theoretically, only a low voltage (<20 volt) ... |
|
| Reactions of Energetic Ions with Thin Film Surfaces |
28 JUN 2002 |
10 pages |
| Authors:
Dennis C. Jacobs; NOTRE DAME UNIV IN DEPT OF CHEMISTRY AND BIOCHEMISTRY
|
| The PI has designed and constructed a multi function vacuum chamber for evaporating metal films and depositing insulating layers. The chamber is to be used for fabricating metal-insulator-metal (M-I-M) devices that function as novel solid-state electron emitters. Nanoscale M-I-M devices deliver hot electrons to the metal/vacuum interface from within the solid. These hot electrons can stimulate nonthermal chemical reactions at the gas/surface interface or supplement the charge density of a ... |
|
| The Development of a Flexible, Usable Plasma Interaction Modeling System |
13 JUN 2002 |
10 pages |
| Authors:
J. M. Fife; M. R. Gibbons; D. B. VanGilder; D. E. Kirtley; AIR FORCE RESEARCH LAB EDWARDS AFB CA SPACE AND MISSILE PROPULSION DIV
|
| A 3-D computational plasma interaction modeling system is being developed to predict the interaction of electric propulsion plumes with surfaces. The system, named COLISEUM, is designed to be flexible, usable, and expandable, allowing users to define surfaces with their choice of off-the-shelf 3-D solid modeling packages. These surfaces are then loaded into COLISEUM which performs plasma operations based on user commands. Functional modules are interchangeable, and can range from simple ... |
|
| Initial Use of a 3-D Plasma Simulation System for Predicting Surface Sputtering and Contamination by Hall Thrusters |
MAY 2002 |
9 pages |
| Authors:
J. M. Fife; M. R. Gibbons; D. B. VanGilder; D. E. Kirtley; AIR FORCE RESEARCH LAB EDWARDS AFB CA SPACE AND MISSILE PROPULSION DIV
|
| A 3-D Plasma Interaction Modeling System is being developed to predict the interaction of electric propulsion plumes with surfaces. The system, named COLISEUM, is designed to be flexible, usable, and expandable, allowing users to define surfaces with their choice of off-the-shelf 3-D solid modeling packages. These surfaces are then loaded into COLISEUM, which performs plasma operations based on user commands. Functional modules are interchangeable, and can range from simple (prescribed ... |
|
| New Integrated Optical Components for Broadband Communication Systems |
APR 2002 |
8 pages |
| Authors:
Anand Gopinath; Richard Osgood; MINNESOTA UNIV MINNEAPOLIS DEPT OF ELECTRICAL AND COMPUTER ENGINEERING
|
| The objectives of this project was to design and fabricate polarization insensitive semiconductor optical amplifiers, design and fabricate planar optical isolators, investigate the possibility of their integration. Quantum well polarization insensitive semiconductor optical amplifiers in GaInAsP and AlInGaAs at 1300 nm, and the latter at 1550 nm were designed and tested, at Minnesota. Planar isolators in the Mach-Zehnder configuration were designed and tested at Columbia. The integration issues were investigated ... |
|
| Architecture and Initial Results of a 3-D Plasma Simulation System for Spacecraft-Thruster Interaction Assessment |
13 MAR 2002 |
10 pages |
| Authors:
J. M. Fife; M. R. Gibbons; D. B. VanGilder; D. E. Kirtley; AIR FORCE RESEARCH LAB EDWARDS AFB CA SPACE AND MISSILE PROPULSION DIV
|
| A 3-D Plasma Interaction Modeling System (PIMS) is being developed to predict the interaction of electric propulsion plumes with surfaces. The system is designed to be flexible, usable, and expandable, allowing users to define and mesh surfaces with their choice of off-the-shelf 3-D solid modeling packages. These surfaces are then loaded into PIMS, which performs plasma operations based on user commands. Functional PIMS modules will range from simple (prescribed plume ... |
|
| Effects of Ion Bombarding and Nitrogenation on the Properties of Photovoltaic a-CNx Thin Films |
JAN 2002 |
6 pages |
| Authors:
Z. B. Zhou; R. Q. Cui; G. M. Hadi; Q. J. Pang; C. Y. Jin; SHANGHAI JIAO TONG UNIV (CHINA)
|
| Amorphous carbon nitride films (a-CN(x)) were synthesized by using single ion beam sputtering of a graphite target in argon and nitrogen sputtering gases. This thin film could be used as a novel photovoltaic material. The films were characterized with the technique of laser Raman, spectroscopic ellipsometry and electron spin resonance spectrometer (ESR). In this paper we report the effects of ion impacting and nitrogenation on the microstructure, density of defect ... |
|
| Quantitative Secondary Ion Mass Spectrometry (SIMS) of III-V Materials |
JAN 2002 |
6 pages |
| Authors:
P. van Lierde; C. Tian; B. Rothman; R. A. Hockett; EVANS ANALYTICAL GROUP SUNNYVALE CA
|
| Secondary ion mass spectrometry (SIMS) provides direct methods to characterize the chemical composition of II-V materials at major, minor and trace level concentrations as a function of layer depth. SIMS employs keV primary ions to sputter the surface and sensitive mass spectrometry techniques to mass analyze and detect sputtered secondary ions which are characteristic of the sample composition. In-depth compositional analysis of these materials by SIMS relies on a number ... |
|
| Effects of As Doping on Properties of ZnO Films |
JAN 2002 |
6 pages |
| Authors:
K. S. Huh; D. K. Hwang; K. H. Bang; M. K. Hong; D. H. Lee; YONSEI UNIV SEOUL (REPUBLIC OF KOREA)
|
| A series of ZnO thin films with various deposition temperatures were prepared on (100) GaAs substrates by radio-frequency magnetron sputtering using ZnO target. The ZnO films were studied by field emission scanning electron microscope(FESEM), x-ray diffraction(XRD), photoluminescence(PL) cathodoluminescence(CL), and Hall measurements. The structural, optical, and electrical properties of the films were discussed as a function of the deposition temperature. With increasing temperature, the compressive stress in the films was released ... |
|
| Transmission Characterization of Drilled Alternating-Layer Three-Dimensional Photonic Crystals |
JAN 2002 |
6 pages |
| Authors:
Eiichi Kuramochi; Masaya Notomi; Itaru Yokohama; Jun-ichi Takahashi; Chiharu Takahashi; TOHOKU UNIV SENDAI (JAPAN)
|
| We propose a new three-dimensional photonic crystal structure or drilled alternating-layer photonic crystal (DALPC), which can be fabricated by a combination of the deposition of alternating layers of dielectric films and one-time dry etching. Our band calculation predicts that the DALPC has a photonic band gap (PBG) in all directions. We fabricated a Si/SiO2 DALPC by electron beam lithography. bias sputtering, and fluoride-gas electron cyclotron resonance etching. We measured the ... |
|
| Optical, Electrical and Microstructural Properties of Tin Doped Indium Oxide Films Made from Sintered Nanoparticles |
NOV 2001 |
5 pages |
| Authors:
Annette Hultaker; Anders Hoel; Claes-Goran Granqvist; Arie van Doorn; Michel J. Jongerius; UPPSALA UNIV (SWEDEN) DEPT OF MATERIALS SCIENCE
|
| Thin transparent and electrically conductive films of tin doped indium oxide (ITO) were made by sintering of nanoparticle dispersions. The resistivity decreased to 1 - 10(exp -2) Omega cm upon treatment at 800 deg C, while the luminous transmittance remained high. The property evolution was connected with sintering and densification as studied by Scanning Electron Microscopy, X-ray Diffraction, X-ray Fluorescence and Elastic Recoil Detection Analysis. |
|
| Optical Nonlinearity of Sputtered Co3O4-SiO2-TiO2 Thin Films |
NOV 2001 |
5 pages |
| Authors:
Hiroki Yamamoto; Takashi Naito; Kazuyuki Hirao; KYOTO UNIV (JAPAN)
|
| Optical non-linearity of cobalt oxide with SiO2-TiO2 additives was investigated, and the change mechanism of the refractive index (n) and extinction coefficient (k), based on the relation between band structure and optical non-linearity of the thin films, was discussed. Refractive index and extinction coefficient of Co3O4 thin films in the ground state were 3.17 and 0.42, respectively. Both n and k decreased by irradiation from a pulse laser with 650 ... |
|
Reports by Keyword(s)
SPUTTERING
