R J Tan - Storming Media

An Elegant Low-cost Materials Solution for Achieving Low Insertion Loss, Affordable Tunable Filters for Next Generation Mobile Communications Platforms

Apr-2009

18 pages

Authors: M W Cole; E Ngo; R J Tan; ARMY RESEARCH LAB ABERDEEN PROVING GROUND MD WEAPONS AND MATERIALS RESEARCH DIRECTORATE

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The effect ultraviolet (UV)-assisted annealing on the structural, dielectric, and insulating properties of barium strontium titanate (BST) thin films was investigated. The material properties of BST films, prepared by RF sputter deposition, annealed via conventional thermal annealing and UV-assisted thermal annealing process protocols were compared and evaluated. The x-ray diffraction results showed contracted lattice constants and enhanced crystallinity for the RF sputtered BST films annealed via the UV-assist treatment. Isothermal-temporal ...