An influence of MBE growth parameters (substrate temperature, total group V flux, and As/Sb flux ratio) on a composition of Al(x)Ga(1-x)As(y)Sb(i-y) alloys (x = 0.5) as well as their structural quality have been studied in detail. Using these data, As and Sb incorporation coefficients have been calculated in two different ways. An effect of the unintentional Sb incorporation in InAs layers is also discussed.
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