We report the fabrication and the operation of nanomechanical resonant structures in nanocrystalline diamond. For this purpose, continuous diamond films as thin as 80 nm were grown using microwave plasma enhanced chemical vapor deposition. The lateral dimensions of the fabricated structures were as small as 50 nm and the measured mechanical resonant frequencies were up to 640 MHz. The mechanical quality factors were in the range of 2500 3000 at ...
The dynamics of single-crystal silicon ;100 mum size rectangular paddle oscillators at room temperature have been studied using a recently developed high-resolution scanning laser vibrometer. The dynamic mechanical behavior is determined by scans of the entire device, providing both amplitude and phase spatial maps of the vibratory response. These reveal more than 16 normal modes below 500 kHz. In addition to simple translation and torsional motion, flexural modes of the ...
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