The program is devoted to the preparation and investigation of two novel kinds of electron-beam-addressable storage elements of submicron size and densely packed arrays of these elements. One such element, called a micro-cap, consists of an isolated microcapacitor at the bottom of a hole in a metal/dielectric/metal film sandwich. The other element, called a micro-ring, consists of an isolated metal film ring embedded concentrically with a hole in the dielectric ...
This report gives the results of experimental work in preparation for the formation of high-density information-storage mosaics consisting of arrays of electrically isolated micron-size film capacitors embedded in a metal-dielectric-metal film sandwich. An exhaustive set of investigations is reported on the electron-lens assembly to be used in preparing and addressing such matrices. Progress on aqueous etching of alumina films with hot orthophosphoric acid and etching of molybdenum films with mixtures ...
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