| Parametric Approach to Determining the Optimum Geometry for PZT MEMS Switches Intended for Digital Applications |
Dec 2010 |
18 pages |
| Authors:
Robert Proie; Ronald Polcawich; Jeff Pulskamp; Daniel Judy; Joe Qiu; ARMY RESEARCH LAB ADELPHI MD SENSORS AND ELECTRON DEVICES DIRECTORATE
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 | We designed lead zirconate titanate (PZT) microelectromechanical systems (MEMS) switches for low frequency digital logic applications. The devices were fabricated with a variety of design variables of interest, including actuator length/width, contact length, actuator/contact geometries, and contact metallurgy (Au/Pt, Au/Ru, and Au/Au). To assess the impact of each variable on device performance, we measured device wafers using a SUSS semi-automated probe station and associated control hardware and software, which evaluated ... |
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| Polymer Materials for Ground Mobile Millimeter-Scale Robotics |
Dec 2008 |
22 pages |
| Authors:
Ryan Rudy; Ronald G Polcawich; Jeff Pulskamp; ARMY RESEARCH LAB ADELPHI MD SENSORS AND ELECTRON DEVICES DIRECTORATE
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| This project is closely tied with the ongoing work of visiting Professor Kenn Oldham and the U.S. Army Research Laboratory's (ARL) joint effort on creating highly flexible, large payload capacity joints for a ground mobile millimeter-scale robot. The fabrication process to add parylene coatings to the piezo-microelectromechanical systems (piezoMEMS) actuator process has been characterized using test structures. Scanning electron and optical microscopy of the joint assemblies; analysis of the coating ... |
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| U.S. Army Research Laboratory Microelectromechanical System Electronically Scanned Antenna Testing at the Aviation and Missile Research, Development and Engineering Center |
JAN 2008 |
20 pages |
| Authors:
Ronald G. Polcawich; Daniel Judy; Jeff Pulskamp; Steve Weiss; Janice Rock; Tracy Hudson; ARMY RESEARCH LAB ADELPHI MD
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| Microelectromechanical System (MEMS) phase shifters have been assembled in a connectorized packages for insertion in a 1x8 linear patch antenna array. The patch array provides a demonstration platform for a MEMS enabled electronically scanned antenna (ESA). The MEMS ESA along with control electronics was tested in receive mode within anechoic chambers at both ARL and Aviation and Missile Research, Development and Engineering Center (AMRDEC). Using a waveguide horn antenna for ... |
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