Technology has been developed for micro electrical and mechanical systems (MEMS) micro motor-compressor and blower devices occupying less than a cubic centimeter. Made with semiconductor manufacturing techniques; these devices are intended for applications such as pressurization for fuel cells in the 50- 150 watt range and the aspiration of analytical instruments. It consists of an integral silicon micro electric motor and centrifugal compressor approximately 4 mm in diameter and 2 ...
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