Electron beams efficiently ionize and dissociate gas, to form low temperature (<1.5 eV) high-density (1O(to the 10)-lO(to the 12)cm(to the -3) plasmas with low internal fields. These plasma sources have culminated in LAPPS, NRL's Large Area Plasma Processing System for surface modification of materials. Single Langmuir probes were constructed and used to determine global plasma parameters (electron temperature, density, and plasma potential) in modulated plasmas generated by high-energy (2 keV) ...
The results of tests of a differential pumping system separating a plasma production cathode chamber and a processing chamber are presented. The tests are a series of measurements taken to evaluate two aspects of system performance. These are the effectiveness of the system to maintain large differential pressures, and, the degree to which different gases in the two chambers can be isolated from one another. It is found that the ...
Electron and ion currents to various electrodes in pulsed, electron beam-produced plasmas were measured in a number of laboratory systems. These experiments showed variations in the measured currents that depended on gas type, cathode material, magnetic field geometry, and electrode impedance. Explanations of these observations are given on a per case basis, after a careful evaluation and comparison of all other experimental factors.
Reports by Author
