This report deals with the development of a new proportional electropneumatic servovalve. The first stage of the valve consists of a piezoelectric bender element of bimorph construction centered between two nozzles. The bimorph acts as a flapper and is deformed by an electrical input signal. This deformation causes a pressure difference to be generated downstream of the nozzles. This pressure difference is then amplified to some usable level using laminar ...
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