A new chemical vapor deposition (CVD) process has been developed to deposit hard coatings, containing tungsten carbide, at temperatures below 500 C. These coatings, which have been applied to both ferrous and nonferrous alloys, exhibit excellent resistance to wear and erosion. The coatings comprise a mixture of tungsten and the tungsten carbide, the latter being present as W2C, W2C + W3C, or W3C. The coatings' composition and properties can be ...