MEMS that can survive ultrahigh-temperatures and corrosive environments are important in a variety of unique applications. This work develops an innovative microfabrication technology for high temperature MEMS: microcasting of injectable polymer-derived SiCN ceramic materials. The techniques allow realization of MEMS with complex, three-dimensional and multilayer geometry useable to 1500 C. Our approach is easy and low cost. Several MEMS were realized and evaluated. The objectives of the extension research project ...
The objective of this project was to design new, innovative microelectromechanical systems (MEMS) to create high-Q tunable capacitors and switches that were superior to the existing on/off switches. The concept was feasible; however, it was very challenging to design and/or process MEMS to meet specific requirements balancing mm-wave and electro -mechanical performance measures, such as quality factor (Q), capacitance range, switching complexity, dynamic response, and reliability. Therefore, we planned to ...
The ability to control the phase of a propagating optical wave front is a key enabling technology for a host of scientific, commercial, medical, and defense applications. The objectives of this project are to advance the state of the art of optical MEMS by addressing the following critical development issues: dynamic range, frequency response, aperture size, and optical power handling ability of micromirrors for thermal lensing compensation in lasing systems ...
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