Epitaxial growth of YBa2Cu3O7-x (YBCO) layers on TiN(0 0 1) surfaces was explored, both with and without CeO2 intermediate layers. The epitaxial TiN layers were grown on MgO(0 0 1) and textured Ni substrates. Thin CeO2 (200 nm thick) and YBCO (300 nm thick) layers were grown on TiN-coated MgO substrates, using pulsed laser deposition. While YBCO grown directly on TiN was of poor quality, a good epitaxial YBCO layer ...