G. N. Babu - Storming Media

Resist Polymers. 9. Thermolysis of Chlorine Containing Acrylate Polymers

JUN 87

Authors: V. L. Rao; Pradeep K. Dhal; G. N. Babu; James C. Chien; MASSACHUSETTS UNIV AMHERST DEPT OF POLYMER SCIENCE AND ENGINEERING

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The thermal degradation of poly(chloroethyl methacrylate) (PCEMA), poly(trichloroethyl methacrylate) (PTCEMA), poly(methyl-alpha-chloroacrylate) (PMCA) and their copolymers with methyl methacrylate (MMA) have been investigated. Both ester decomposition and main chain scission occurs for the chloroalkyl methacrylate polymers with the former playing the dominant role. In contradistinction, HCl elimination and aromatization prevail over other processes for PMCA. The thermolysis results are compared with radiolysis results.

Resist Rolymers. 8. Thermolysis of Bromine Containing Acrylate Polymers

JUN 87

Authors: Pradeep K. Dhal; G. N. Babu; James C. Chien; MASSACHUSETTS UNIV AMHERST DEPT OF POLYMER SCIENCE AND ENGINEERING

Thermal decomposition of synthetic polymer can exclude its usage in certain applications. It is often found that the thermal decomposition of polymer can differ significantly from those of model compounds because the chain environment may modify reaction pathways. The thermolysis of bromine containing polymers is particularly interesting because of their role as proven flame retardants. The bromine containing polymers behave differently from the fluorine and chlorine analogs toward energetic radiation ...

Radiolysis of Resist Polymers. 1. Poly(methyl-alpha-haloacrylates) and Copolymers with Methylmethacrylate

AUG 1983

Authors: G. N. Babu; A. Narula; S. L. Hsu; James C. W. Chien; MASSACHUSETTS UNIV AMHERST MATERIALS RESEARCH LAB

Methyl alpha-chloroacrylate (MCA) and methyl alpha-bromoacrylate (MBA) were copolymerized with methyl methacrylate (MMA) over a broad range of composition. The copolymers were exposed to gamma-radiation to determine chain scission susceptibility. The mechanisms of degradation of copolymers towards radiation was suggested from product analysis. The radiolysis of copolymers of MMA with MCA and MBA are dominated by the alpha-halogenated monomers. (Author)

Radiolysis of Resist Polymers. III. Copolymers of Methyl-Alpha- Chloroacrylate and Trihaloethylmethacrylates

AUG 1983

Authors: G. N. Babu; P. H. Lu; S. L. Hsu; J. C. W. Chien; MASSACHUSETTS UNIV AMHERST MATERIALS RESEARCH LAB

Homopolymers of 2,2,2-trifluoroethyl methacrylate (TFEMA) and 2,2,2- trichloroethyl methacrylate (TCEMA) and copolymers with methyl alpha- chloroacrylate (MCA) of a range of composition were synthesized. Radiolysis of copolymers are initiated by dissociative electron capture by the halogen atom. GC-MS analysis of volatile products show that the poly(TFEMA) tend to depolymerize but not poly(TCEMA). Some of the polymers merit further investigations for E-beam or X-ray lithographic applications. (Author)

Radiolysis of Resist Polymers. IV. Poly(p-substituted-alpha- methylstyrenes)

AUG 1983

Authors: G. N. Babu; P. H. Lu; S. L. Hsu; J. C. W. Chien; MASSACHUSETTS UNIV AMHERST MATERIALS RESEARCH LAB

The effect of saver-substituent on the radiation chemistry of poly(alpha-methylstyrene) (PMS) was compared for the fluoro (PFMS), chloro (PCMS), bromo (PBMS) isopropyl (PIPMS) and methoxy (PMEOM) derivatives. The radiolysis yields, ESR spectra and GC-MS analysis of products were obtained. PMEOMS and PIPMS gel readily by gamma-radiation. They may be useful as negative resist materials. (Author)

Radiolysis of Resist Polymers. 2. Poly(haloalkylmethacrylates) and Copolymers with Methylmethacrylate

AUG 1983

Authors: G. N. Babu; A. Narula; P. H. Lu; X. Li; S. L. Hus; MASSACHUSETTS UNIV AMHERST MATERIALS RESEARCH LAB

Homopolymers of 2-fluoroethyl methacrylate (FEMA), 2-chlorethyl methacrylate (CEMA) 2-bromoethyl methacrylate (BEMA), 2,2,2-trichloroethyl methacrylate (TCEMA), 2,3-dibromopropyl methacrylate (DBPMA) and copolymers with MMA over a range of compositions have been synthesized. Gamma-radiolysis yields for scission (Gs), crosslinking (Gx) and radical formation (Gr) were determined. The volatile products were analyzed by GC-MS. Probable mechanisms of radiolysis of all polymers were proposed. (Author)