We developed fabrication technology, advanced materials and design techniques to realize resonance enhanced modulators with ring-resonators. The devices are based on a lateral geometry with deeply etched waveguides in InP. ICP etching techniques and masks were developed to obtain sub-micrometer deep etched waveguides with nanometer residual sidewall roughness for low optical loss and high quality resonators. Ultra compact multi-mode interference (MMI) couplers are designed and fabricated for coupling of the ...
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