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Optics and AcousticsPhotography

Achieving Uniform Multilayer Coatings on Figured Optics,

Authors: W. K. Waskiewicz; D. L. Windt; J. E. Bjorkholm; L. Eichner; R. R Freeman; AT AND T BELL LABS MURRAY HILL NJ
Abstract:
We discuss design considerations for high-reflectance multilayer coatings for use in soft X-ray projection lithography optical systems. Techniques used to control and characterize coating uniformity on figured optics are described. Recent results are presented.

Pages: 4
Report Date: 22 MAY 1992
Report Number: P842700

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Keywords relating to this report:
*LITHOGRAPHY
*OPTICS
COATINGS
CONTROL
REFLECTANCE
SOFT X RAYS
X RAYS
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