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Electronics and FluidicsElectrical and Electronic Equipment

A MEMS Based Absorption Micro-Spectrometer for Toxic Vapor Detection and Identification

Authors: E. R. Schildkraut; David Reyes; Daniel J. Cavicchio; James O. Jensen; BLOCK MEMS LLC MARLBOROUGH MA
Abstract:
A two year effort has begun to design, fabricate and test a MEMS based infrared absorption interferometer spectrometer for use in the 2-13.5 m spectral region for the detection and identification of toxic vapors. Sensitivity projections and enhancements are outlined and compared to requirements for several applications. The initial design approach using compliant mechanisms and unique combination of existing and developmental components is outlined and tradeoff between resolution, sensitivity and breadth of applications is discussed.

Limitations: APPROVED FOR PUBLIC RELEASE
Description: Conference paper
Pages: 9
Report Date: 17 NOV 2004
Report Number: A775944
Keywords relating to this report:
ABSORPTION
CHEMICAL DETECTION
DETECTION
ELASTIC PROPERTIES
FALSE ALARMS
IDENTIFICATION
MICROELECTROMECHANICAL SYSTEMS
SENSITIVITY
SPECTROMETERS
SPECTROSCOPY
SURFACE ACOUSTIC WAVES
SYMPOSIA
TOXICITY
VAPORS
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