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Electronics and FluidicsElectrical and Electronic Equipment

Characterization of Self-Assembled SnO2 Nanoparticles for Fabrication of a High Sensitivity and High Selectivity Micro-Gas Sensor

Authors: R. C. Ghan; Y. Lvov; R. S. Besser; LOUISIANA TECH UNIV RUSTON INST FOR MICROMANUFACTURING
Abstract:
In order to refine further the material technology for tin-oxide based gas sensing we are exploring the use of precision nanoparticle deposition for the sensing layer. Layers of SnO2 nanoparticles were grown on Quartz Crystal Microbalance (QCM) resonators using the layer-by-layer self-assembly technique. Scanning Electron Microscopy (SEM), Transmission Electron Microscopy (TEM). and Electron Diffraction Pattern (EDP) analyses were performed on the self-assembled layers of SnO2 nanoparticles. The results showed that SnO2 nanoparticle films are deposited uniformly across the substrate. The size of the nanoparticles is estimated to be about 3-5 nm. Electrical characterization was done using standard current-voltage measurement technique, which revealed that SnO2 nanoparticle films exhibit ohmic behavior. Calcination experiments have also been carried out by baking the substrate (with self-assembled nanoparticles) in air at 350 deg C. Results show that 50%-70% of the polymer layers (which are deposited as precursor layers and also alternately in-between SnO2 nanoparticle monolayers) are eliminated during the process.

Limitations: APPROVED FOR PUBLIC RELEASE
Pages: 6
Report Date: NOV 2001
Report Number: P712210
Keywords relating to this report:
*MICROSENSORS
*SELF ASSEMBLED MONOLAYERS
Calcination
DIOXIDES
ELECTRICAL PROPERTIES
FABRICATION
GAS DETECTORS
HIGH SENSITIVITY
PARTICLE SIZE
QUARTZ RESONATORS
SUBSTRATES
TIN COMPOUNDS
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