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Physics and AstronomyAtomic and Molecular Physics and Spectroscopy

Mercury Cadmium Telluride Sputtered Target Research

Authors: Roy H. Cornely; Lawrence Suchow; Robert Bourne; NEW JERSEY INST OF TECH NEWARK DEPT OF ELECTRICAL ENGINEERING
Abstract:
Techniques for fabricating large-area targets by pressing either a physical mixture of HgTe and CdTe powder particles (7 micron average size) or a similar-size powder ground from (Hg,Cd)Te polycrystalline ingots were developed. Sixty SEM microphotographs of regions of r.f. triode-sputtered targets, sputtered to different erosion depths, revealed topographical changes and dynamic erosion processes, e.g. cone formation and deteriotion. The sputter- protect theory for cone formation due to larger, slow-sputtering particles (10- 50 microns) was demonstrated. Distinctly different cone angle distributions for HgTe and CdTe particles were measured; x-ray powder patterns revealed fusion of smaller HgTe and CdTe particles.

Description: Final technical rept.
Pages: 48
Report Date: 29 JUN 1982
Contract Number: DAAG29-78-G-0066
Report Number: A654711

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Keywords relating to this report:
*Cadmium tellurides
*ELECTRON MICROSCOPY
*MERCURY
*Processing
*SPUTTERING
ALCOHOLS
BROMINE
ETCHING
LOW TEMPERATURE
METHYL RADICALS
POWDER METALS
SCANNING
SPECTROSCOPY
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