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Materials SciencesCrystallography

Q2 Known Good Substrates Technical Report

Authors: Eric Carlson; Mark Loboda; Gilyong Chung; Rebecca Lauer; DOW CORNING CORP MIDLAND MI
 
Abstract: The Known Good Substrates (KGS) Phase III program was initiated 29 September 2008. Wafer, epitaxy, modeling and metrology work has been the main focus of efforts in Q2. This technical report summarizes the progress by all team members against the tasks and milestones.

Limitations: APPROVED FOR PUBLIC RELEASE
Description: Quarterly technical rept. 1 Jan-31 Mar 2009
Pages: 11
Report Date: 05-May-2009
Contract Number: N00014-08-C-0398 N0001408C0398
Report Number: A604994
Keywords relating to this report:
*SILICON CARBIDES
*Substrates
CRYSTAL GROWTH
DOPING
EPITAXIAL GROWTH
FABRICATION
METROLOGY
TOPOGRAPHY
WAFERS
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