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Extended Abstracts. Laser Chemical Processing of Semiconductor Devices. Proceedings of Symposium B 1984 Fall meeting of the Materials Research Society Held on 27-29 November 1984 at Boston, Massachusetts
Authors: F. A. Houle; T. F. Deutsch; R. M. Osgood Jr; MATERIALS RESEARCH SOCIETY UNIVERSITY PARK PA |
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Abstract:
The conference emphasized the following areas: Fundamental mechanisms, laser-assisted growth of semiconductor films, process diagnostics, metallization from thin films and gases, photochemical etching, fundamental processes, and dielectric photoformation. Keywords: Semiconductor devices; Laser diagnostics; Lasers; Metallization; Photochemical Etching; Dielectric Photoformation. (Author) ANNOTATION: Reprint: Extended Abstracts. Laser Chemical Processing of Semiconductor Devices.
| Description: |
Final rept. 1 Nov-31 Dec 84 |
| Pages: |
127 |
| Report Date: |
84 |
| Contract Number: |
DAAG29-85-G-0077, AFOSR-85-000 |
| Report Number: |
A453651 |
Report Unavailable |
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