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Electronics and FluidicsElectrooptical and Optoelectronic Devices

Defect Analysis of Roll-to-Roll SAIL Manufactured Flexible Display Backplanes

Authors: Carl Taussig; Richard E Elder; Warren B Jackson; Albert Jeans; Mehrban Jam; Ed Holland; Hao Luo; John Maltabes; Craig Perlov; Steven Trovinger; HEWLETT-PACKARD LABS PALO ALTO CA
Abstract:
HP and Phicot have made the world's first roll-to-roll (R2R) manufactured active matrix displays. Currently we are developing a wrist-worn solar powered display for the U.S. Army. As we scale from research to preproduction on our 1/3 meter wide pilot line defect analysis and mitigation is our primary focus. In this presentation we will review the self-aligned imprint lithography (SAIL) process and discuss defects we observe, and the tools, and processes we have developed to detect and eliminate them

Limitations: APPROVED FOR PUBLIC RELEASE
Pages: 6
Report Date: Jan 2011
Contract Number: W911NF-08-2-0063
Report Number: A054945
Keywords relating to this report:
DEFECT ANALYSIS
FABRICATION
FLEXIBLE MATERIALS
LITHOGRAPHY
MATRIX DISPLAYS
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